JPS5640979B2 - - Google Patents
Info
- Publication number
- JPS5640979B2 JPS5640979B2 JP13255875A JP13255875A JPS5640979B2 JP S5640979 B2 JPS5640979 B2 JP S5640979B2 JP 13255875 A JP13255875 A JP 13255875A JP 13255875 A JP13255875 A JP 13255875A JP S5640979 B2 JPS5640979 B2 JP S5640979B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13255875A JPS5255871A (en) | 1975-11-04 | 1975-11-04 | Production of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13255875A JPS5255871A (en) | 1975-11-04 | 1975-11-04 | Production of semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5255871A JPS5255871A (en) | 1977-05-07 |
| JPS5640979B2 true JPS5640979B2 (en]) | 1981-09-25 |
Family
ID=15084089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13255875A Granted JPS5255871A (en) | 1975-11-04 | 1975-11-04 | Production of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5255871A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684989U (en]) * | 1979-12-06 | 1981-07-08 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5553439A (en) * | 1978-10-16 | 1980-04-18 | Fujitsu Ltd | Dicing treatment method |
| JPS55140243A (en) * | 1979-04-20 | 1980-11-01 | Hitachi Ltd | Dicing device |
| JPS5758332A (en) * | 1980-09-24 | 1982-04-08 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS61212037A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Electronics Eng Co Ltd | 座標値読み取り方法 |
| JP2530827B2 (ja) * | 1986-11-19 | 1996-09-04 | 株式会社東京精密 | ダイシング装置の溝切制御方法 |
| JP2501970B2 (ja) * | 1991-05-14 | 1996-05-29 | 株式会社東京精密 | ダイシング装置の溝切制御装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854501B2 (ja) * | 1974-12-06 | 1983-12-05 | 日本電気株式会社 | ハンドウタイペレツトノ イチアワセホウホウ オヨビ ソウチ |
-
1975
- 1975-11-04 JP JP13255875A patent/JPS5255871A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684989U (en]) * | 1979-12-06 | 1981-07-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5255871A (en) | 1977-05-07 |